Inventor
CHIESL NEWELL E
US5 patents
Patents
5 patentsUS6177305B1Jan 23, 2001
Fabrication of metal-insulator-metal capacitive structures
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US6641635B1Nov 4, 2003
Liquid based air filtration system
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US6775630B2Aug 10, 2004
Web-based interface with defect database to view and update failure events
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US6770505B1Aug 3, 2004
Arrangement for measuring pressure on a semiconductor wafer and an associated method for fabricating a semiconductor wafer
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US6582568B1Jun 24, 2003
First stage salicidation of cobalt during cobalt deposition or subsequent Ti or Tin cap deposition using energy from a directional plasma
LSI LOGIC CORP0 citations48