Inventor
WASHIO KEISUKE
JP13 patents
Patents
13 patentsUS10508338B2Dec 17, 2019
Device for atomic layer deposition
JAPAN STEEL WORKS LTD2 citations71
US10889893B2Jan 12, 2021
Atomic layer deposition apparatus and atomic layer deposition method
JAPAN STEEL WORKS LTD0 citations61
US12009183B2Jun 11, 2024
Film-forming method, manufacturing method of electronic device, and plasma atomic layer deposition apparatus
JAPAN STEEL WORKS LTD0 citations60
US11024488B2Jun 1, 2021
Film-forming method, manufacturing method of electronic device, and plasma atomic layer deposition apparatus
JAPAN STEEL WORKS LTD0 citations60
US11453944B2Sep 27, 2022
Atomic layer deposition apparatus and atomic layer deposition method
JAPAN STEEL WORKS LTD0 citations50
US11127926B2Sep 21, 2021
Method of forming protection film for organic EL device, method of manufacturing display device and display device
JAPAN STEEL WORKS LTD0 citations50
US11062883B2Jul 13, 2021
Atomic layer deposition apparatus
JAPAN STEEL WORKS LTD0 citations50
US10988841B2Apr 27, 2021
Film-forming method, manufacturing method of electronic device, and mask holder
JAPAN STEEL WORKS LTD0 citations50
US10833293B2Nov 10, 2020
Display apparatus and method of manufacturing the same
JAPAN STEEL WORKS LTD0 citations50
US11180848B2Nov 23, 2021
Atomic layer deposition apparatus, film-forming method using atomic layer deposition apparatus, and cleaning method of atomic layer deposition apparatus
JAPAN STEEL WORKS LTD0 citations45
US10633737B2Apr 28, 2020
Device for atomic layer deposition
JAPAN STEEL WORKS LTD0 citations40
US10604838B2Mar 31, 2020
Apparatus for atomic layer deposition and exhaust unit for apparatus for atomic layer deposition
JAPAN STEEL WORKS LTD0 citations40
US10519549B2Dec 31, 2019
Apparatus for plasma atomic layer deposition
JAPAN STEEL WORKS LTD0 citations40