Inventor

COSTON SCOTT D

US7 patents

⚠️ This page may combine multiple inventors who share the name “COSTON SCOTT D”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

ASML HOLDING NV

4 patents

US7079321B2Jul 18, 2006

Illumination system and method allowing for varying of both field height and pupil

ASML HOLDING NV10 citations70

US6888615B2May 3, 2005

System and method for improving linewidth control in a lithography device by varying the angular distribution of light in an illuminator as a function of field position

ASML HOLDING NV9 citations70

US8013979B2Sep 6, 2011

Illumination system with low telecentricity error and dynamic telecentricity correction

ASML HOLDING NV2 citations61

US6784976B2Aug 31, 2004

System and method for improving line width control in a lithography device using an illumination system having pre-numerical aperture control

ASML HOLDING NV2 citations59

VISSER HUIBERT

2 patents

US8164740B2Apr 24, 2012

Illumination system coherence remover with two sets of stepped mirrors

VISSER HUIBERT4 citations56

US8159651B2Apr 17, 2012

Illumination system coherence remover with a series of partially reflective surfaces

VISSER HUIBERT0 citations45

COSTON SCOTT D

1 patent

US8164739B2Apr 24, 2012

Controlling fluctuations in pointing, positioning, size or divergence errors of a beam of light for optical apparatus

COSTON SCOTT D0 citations31