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Inventor
MANKAWA HIROFUMI
JP
3 patents
⚠️ This page may combine multiple inventors who share the name “MANKAWA HIROFUMI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
NORITSU KOKI CO LTD
1 patent
US7682482B2
Mar 23, 2010
Plasma generation apparatus and work processing apparatus
NORITSU KOKI CO LTD
7 citations
71
MATSUUCHI HIDETAKA
1 patent
US8128783B2
Mar 6, 2012
Plasma generator and work processing apparatus provided with the same
MATSUUCHI HIDETAKA
4 citations
58
SAIAN CORP
1 patent
US7976672B2
Jul 12, 2011
Plasma generation apparatus and work processing apparatus
SAIAN CORP
1 citations
42