Inventor

KUROIWA SHUNJI

JP3 patents

⚠️ This page may combine multiple inventors who share the name “KUROIWA SHUNJI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

SHIBAURA MECHATRONICS CORP

1 patent

US7935232B2May 3, 2011

Sputtering apparatus and method, and sputtering control program

SHIBAURA MECHATRONICS CORP3 citations52

ULVAC INC

1 patent

US8349645B2Jan 8, 2013

Mask and film formation method using the same

ULVAC INC0 citations48

WATAI MIWA

1 patent

US8198115B2Jun 12, 2012

Solar cell, and method and apparatus for manufacturing the same

WATAI MIWA0 citations29