Inventor

FURUUCHI KEI

JP4 patents

⚠️ This page may combine multiple inventors who share the name “FURUUCHI KEI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

MIURA YUKIO

1 patent

US9330953B2May 3, 2016

Electrostatic chuck device

MIURA YUKIO7 citations81

KOSAKAI MAMORU

1 patent

US9343346B2May 17, 2016

Electrostatic chuck apparatus

KOSAKAI MAMORU17 citations80

TOKYO ELECTRON LTD

1 patent

US9412635B2Aug 9, 2016

Electrostatic chuck device

TOKYO ELECTRON LTD4 citations72

SUMITOMO OSAKA CEMENT CO LTD

1 patent

US9837296B2Dec 5, 2017

Electrostatic chuck apparatus

SUMITOMO OSAKA CEMENT CO LTD6 citations71