Inventor
Liu Chung-Hsuan
TW5 patents
Patents
5 patentsUS12032302B2Jul 9, 2024
Method and device for cleaning substrates
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations70
US11079669B2Aug 3, 2021
System and method for localized EUV pellicle glue removal
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations60
US10520805B2Dec 31, 2019
System and method for localized EUV pellicle glue removal
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations60
US12393129B2Aug 19, 2025
Method and device for cleaning substrates
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations59
US11430671B2Aug 30, 2022
Ozone wafer cleaning module having an ultraviolet lamp module with rotatable reflectors
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations59