Inventor
CARLSON DAVID K
US85 patents
⚠️ This page may combine multiple inventors who share the name “CARLSON DAVID K”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
43 patentsUS5607724AMar 4, 1997
Low temperature high pressure silicon deposition method
APPLIED MATERIALS INC102 citations99
US8008166B2Aug 30, 2011
Method and apparatus for cleaning a substrate surface
APPLIED MATERIALS INC236 citations98
US5179677AJan 12, 1993
Apparatus and method for substrate heating utilizing various infrared means to achieve uniform intensity
APPLIED MATERIALS INC125 citations98
US6455814B1Sep 24, 2002
Backside heating chamber for emissivity independent thermal processes
APPLIED MATERIALS INC51 citations96
US5916369AJun 29, 1999
Gas inlets for wafer processing chamber
APPLIED MATERIALS INC117 citations96
US5876797AMar 2, 1999
Low temperature high pressure silicon deposition method
APPLIED MATERIALS INC81 citations96
US5700520ADec 23, 1997
Low temperature, high pressure silicon deposition method
APPLIED MATERIALS INC78 citations96
US6476362B1Nov 5, 2002
Lamp array for thermal processing chamber
APPLIED MATERIALS INC63 citations95
US5421957AJun 6, 1995
Low temperature etching in cold-wall CVD systems
APPLIED MATERIALS INC109 citations95
US5258824ANov 2, 1993
In-situ measurement of a thin film deposited on a wafer
APPLIED MATERIALS INC87 citations95
US6153260ANov 28, 2000
Method for heating exhaust gas in a substrate reactor
APPLIED MATERIALS INC45 citations94
US6064799AMay 16, 2000
Method and apparatus for controlling the radial temperature gradient of a wafer while ramping the wafer temperature
APPLIED MATERIALS INC46 citations93
US9695508B2Jul 4, 2017
Liner assembly for chemical vapor deposition chamber
APPLIED MATERIALS INC18 citations92
US7645339B2Jan 12, 2010
Silicon-containing layer deposition with silicon compounds
APPLIED MATERIALS INC14 citations92
US7540920B2Jun 2, 2009
Silicon-containing layer deposition with silicon compounds
APPLIED MATERIALS INC31 citations92
US6083323AJul 4, 2000
Method for controlling the temperature of the walls of a reaction chamber during processing
APPLIED MATERIALS INC34 citations92
US5924058AJul 13, 1999
Permanently mounted reference sample for a substrate measurement tool
APPLIED MATERIALS INC27 citations92
US5855677AJan 5, 1999
Method and apparatus for controlling the temperature of reaction chamber walls
APPLIED MATERIALS INC37 citations92
US4928626AMay 29, 1990
Reactant gas injection for IC processing
APPLIED MATERIALS INC40 citations92
US6500734B2Dec 31, 2002
Gas inlets for wafer processing chamber
APPLIED MATERIALS INC45 citations91
US6368567B2Apr 9, 2002
Point-of-use exhaust by-product reactor
APPLIED MATERIALS INC19 citations91
US6254686B1Jul 3, 2001
Vented lower liner for heating exhaust gas from a single substrate reactor
APPLIED MATERIALS INC28 citations90
US5914050AJun 22, 1999
Purged lower liner
APPLIED MATERIALS INC46 citations90
US6245149B1Jun 12, 2001
Inert barrier for high purity epitaxial deposition systems
APPLIED MATERIALS INC46 citations87
US9845550B2Dec 19, 2017
Upper dome with injection assembly
APPLIED MATERIALS INC7 citations84
US9322097B2Apr 26, 2016
EPI base ring
APPLIED MATERIALS INC7 citations84
US7967911B2Jun 28, 2011
Apparatus and methods for chemical vapor deposition
APPLIED MATERIALS INC12 citations84
US7758697B2Jul 20, 2010
Silicon-containing layer deposition with silicon compounds
APPLIED MATERIALS INC10 citations84
US7560352B2Jul 14, 2009
Selective deposition
APPLIED MATERIALS INC15 citations84
US7709391B2May 4, 2010
Methods for in-situ generation of reactive etch and growth specie in film formation processes
APPLIED MATERIALS INC8 citations83
US5476359ADec 19, 1995
Robotically loaded epitaxial deposition apparatus
APPLIED MATERIALS INC14 citations80
US5374159ADec 20, 1994
Robotically loaded epitaxial deposition apparatus
APPLIED MATERIALS INC17 citations80
US6436194B1Aug 20, 2002
Method and a system for sealing an epitaxial silicon layer on a substrate
APPLIED MATERIALS INC10 citations74
US6376387B2Apr 23, 2002
Method of sealing an epitaxial silicon layer on a substrate
APPLIED MATERIALS INC13 citations74
US10557203B2Feb 11, 2020
Temperature control system and process for gaseous precursor delivery
APPLIED MATERIALS INC4 citations73
US10119192B2Nov 6, 2018
EPI base ring
APPLIED MATERIALS INC3 citations73
US9857028B2Jan 2, 2018
Chamber pressure control apparatus for chemical vapor deposition systems
APPLIED MATERIALS INC2 citations73
US9396909B2Jul 19, 2016
Gas dispersion apparatus
APPLIED MATERIALS INC3 citations73
US8343317B2Jan 1, 2013
In situ cleaning of CVD System exhaust
APPLIED MATERIALS INC5 citations73
US5316794AMay 31, 1994
Method for servicing vacuum chamber using non-reactive gas-filled maintenance enclosure
APPLIED MATERIALS INC12 citations73
US9768043B2Sep 19, 2017
Quartz upper and lower domes
APPLIED MATERIALS INC4 citations72
US6876442B2Apr 5, 2005
Method of calibrating and using a semiconductor processing system
APPLIED MATERIALS INC10 citations71
US6315833B1Nov 13, 2001
Silicon carbide sleeve for substrate support assembly
APPLIED MATERIALS INC14 citations71
CARLSON DAVID K
3 patentsSANCHEZ ERROL ANTONIO C
2 patentsPATALAY KAILASH K
1 patentBAO XINYU
1 patentShowing the top 50 of 85 patents by PatentIndex Score.