Inventor
RÄISÄNEN PETRI
US8 patents
Patents
8 patentsUS10002936B2Jun 19, 2018
Titanium aluminum and tantalum aluminum thin films
ASM IP HOLDING BV4 citations83
US9981286B2May 29, 2018
Selective formation of metal silicides
ASM IP HOLDING BV11 citations81
US11430656B2Aug 30, 2022
Deposition of oxide thin films
ASM IP HOLDING BV2 citations72
US10636889B2Apr 28, 2020
Titanium aluminum and tantalum aluminum thin films
ASM IP HOLDING BV1 citations72
US12237392B2Feb 25, 2025
Titanium aluminum and tantalum aluminum thin films
ASM IP HOLDING BV0 citations62
US12154785B2Nov 26, 2024
Deposition of oxide thin films
ASM IP HOLDING BV0 citations62
US11139383B2Oct 5, 2021
Titanium aluminum and tantalum aluminum thin films
ASM IP HOLDING BV0 citations62
US12243747B2Mar 4, 2025
Methods of forming structures including vanadium boride and vanadium phosphide layers
ASM IP HOLDING BV0 citations59