Inventor
MYO NYI O
US30 patents
⚠️ This page may combine multiple inventors who share the name “MYO NYI O”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
24 patentsUS7976631B2Jul 12, 2011
Multi-gas straight channel showerhead
APPLIED MATERIALS INC247 citations97
US9695508B2Jul 4, 2017
Liner assembly for chemical vapor deposition chamber
APPLIED MATERIALS INC18 citations92
US10930543B2Feb 23, 2021
Thermal processing susceptor
APPLIED MATERIALS INC4 citations83
US10062598B2Aug 28, 2018
Thermal processing susceptor
APPLIED MATERIALS INC7 citations83
US9644267B2May 9, 2017
Multi-gas straight channel showerhead
APPLIED MATERIALS INC6 citations82
US11821088B2Nov 21, 2023
Multi zone spot heating in EPI
APPLIED MATERIALS INC2 citations73
US11177144B2Nov 16, 2021
Wafer spot heating with beam width modulation
APPLIED MATERIALS INC5 citations73
US11021795B2Jun 1, 2021
Multi zone spot heating in epi
APPLIED MATERIALS INC4 citations73
US10074555B2Sep 11, 2018
Non-contact substrate processing
APPLIED MATERIALS INC4 citations73
US10269614B2Apr 23, 2019
Susceptor design to reduce edge thermal peak
APPLIED MATERIALS INC3 citations72
US10260164B2Apr 16, 2019
Methods and apparatus for deposition processes
APPLIED MATERIALS INC1 citations72
US11171023B2Nov 9, 2021
Diode laser for wafer heating for EPI processes
APPLIED MATERIALS INC4 citations71
US12400904B2Aug 26, 2025
Thermal processing susceptor
APPLIED MATERIALS INC0 citations62
US11848226B2Dec 19, 2023
Thermal processing susceptor
APPLIED MATERIALS INC0 citations62
US11815401B2Nov 14, 2023
Temperature calibration with band gap absorption method
APPLIED MATERIALS INC0 citations62
US11359972B2Jun 14, 2022
Temperature calibration with band gap absorption method
APPLIED MATERIALS INC0 citations62
US11021790B2Jun 1, 2021
Liner for processing chamber
APPLIED MATERIALS INC0 citations62
US10770319B2Sep 8, 2020
EPI thickness tuning by pulse or profile spot heating
APPLIED MATERIALS INC1 citations62
US10519547B2Dec 31, 2019
Susceptor design to eliminate deposition valleys in the wafer
APPLIED MATERIALS INC1 citations61
US12449309B2Oct 21, 2025
Methods for detection using optical emission spectroscopy
APPLIED MATERIALS INC0 citations60
US11807931B2Nov 7, 2023
Chamber injector
APPLIED MATERIALS INC0 citations59
US11492704B2Nov 8, 2022
Chamber injector
APPLIED MATERIALS INC0 citations59
US10731272B2Aug 4, 2020
Methods and apparatus for deposition processes
APPLIED MATERIALS INC0 citations51
US12037701B2Jul 16, 2024
Multi-thermal CVD chambers with shared gas delivery and exhaust system
APPLIED MATERIALS INC0 citations50