Inventor

CHENG CHUNG-HSIU

TW4 patents

⚠️ This page may combine multiple inventors who share the name “CHENG CHUNG-HSIU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

TAIWAN SEMICONDUCTOR MFG CO LTD

2 patents

US12062523B2Aug 13, 2024

Methods and systems for cooling plasma treatment components

TAIWAN SEMICONDUCTOR MFG CO LTD0 citations54

US10867816B2Dec 15, 2020

Method and apparatus for wafer backside cooling

TAIWAN SEMICONDUCTOR MFG CO LTD0 citations27

TAIWAN SEMICONDUCTOR MFG

1 patent

US6833233B2Dec 21, 2004

Deep UV-resistant photoresist plug for via hole

TAIWAN SEMICONDUCTOR MFG3 citations60

CHENG CHUNG-HSIU

1 patent

US8673788B2Mar 18, 2014

Method of forming a layer on a semiconductor substrate having a plurality of trenches

CHENG CHUNG-HSIU1 citations39