Inventor
VAID ALOK
US20 patents
⚠️ This page may combine multiple inventors who share the name “VAID ALOK”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
GLOBALFOUNDRIES INC
13 patentsUS9121890B2Sep 1, 2015
Planar metrology pad adjacent a set of fins of a fin field effect transistor device
GLOBALFOUNDRIES INC5 citations82
US10664638B1May 26, 2020
Measuring complex structures in semiconductor fabrication
GLOBALFOUNDRIES INC7 citations79
US8892237B2Nov 18, 2014
Systems and methods for fabricating semiconductor device structures using different metrology tools
GLOBALFOUNDRIES INC5 citations72
US10030971B2Jul 24, 2018
Measurement system and method for measuring in thin films
GLOBALFOUNDRIES INC5 citations66
US9129905B2Sep 8, 2015
Planar metrology pad adjacent a set of fins of a fin field effect transistor device
GLOBALFOUNDRIES INC3 citations61
US11300948B2Apr 12, 2022
Process control of semiconductor fabrication based on spectra quality metrics
GLOBALFOUNDRIES INC1 citations59
US10121711B2Nov 6, 2018
Planar metrology pad adjacent a set of fins of a fin field effect transistor device
GLOBALFOUNDRIES INC0 citations51
US9177873B2Nov 3, 2015
Systems and methods for fabricating semiconductor device structures
GLOBALFOUNDRIES INC1 citations49
US7682845B2Mar 23, 2010
Methods for calibrating a process for growing an epitaxial silicon film and methods for growing an epitaxial silicon film
GLOBALFOUNDRIES INC1 citations48
US10508900B2Dec 17, 2019
Three-dimensional scatterometry for measuring dielectric thickness
GLOBALFOUNDRIES INC0 citations45
US9903707B2Feb 27, 2018
Three-dimensional scatterometry for measuring dielectric thickness
GLOBALFOUNDRIES INC1 citations45
US9281249B2Mar 8, 2016
Decoupling measurement of layer thicknesses of a plurality of layers of a circuit structure
GLOBALFOUNDRIES INC0 citations40
US9995692B2Jun 12, 2018
Systems and methods of controlling a manufacturing process for a microelectronic component
GLOBALFOUNDRIES INC0 citations31