Inventor
ACOSTA RAUL E
US9 patents
Patents
9 patentsUS6639488B2Oct 28, 2003
MEMS RF switch with low actuation voltage
IBM75 citations95
US6492708B2Dec 10, 2002
Integrated coil inductors for IC devices
IBM46 citations95
US6762088B2Jul 13, 2004
High Q inductor with faraday shield and dielectric well buried in substrate
IBM28 citations92
US6720230B2Apr 13, 2004
Method of fabricating integrated coil inductors for IC devices
IBM29 citations92
US6534843B2Mar 18, 2003
High Q inductor with faraday shield and dielectric well buried in substrate
IBM35 citations92
US5793836AAug 11, 1998
X-ray mask pellicle
IBM51 citations92
US4717591AJan 5, 1988
Prevention of mechanical and electronic failures in heat-treated structures
IBM35 citations88
US5958631ASep 28, 1999
X-ray mask structure
IBM17 citations83
US4479980AOct 30, 1984
Plating rate monitor
IBM19 citations73