Inventor
LINHOLM LOREN W
US7 patents
Patents
7 patentsUS5857258AJan 12, 1999
Electrical test structure and method for measuring the relative locations of conductive features on an insulating substrate
US COMMERCE133 citations96
US5602492AFeb 11, 1997
Electrical test structure and method for measuring the relative locations of conducting features on an insulating substrate
US COMMERCE108 citations96
US5617340AApr 1, 1997
Method and reference standards for measuring overlay in multilayer structures, and for calibrating imaging equipment as used in semiconductor manufacturing
US COMMERCE133 citations95
US5218211AJun 8, 1993
System for sampling the sizes, geometrical distribution, and frequency of small particles accumulating on a solid surface
US COMMERCE47 citations92
US5920067AJul 6, 1999
Monocrystalline test and reference structures, and use for calibrating instruments
US COMMERCE43 citations91
US5684301ANov 4, 1997
Monocrystalline test structures, and use for calibrating instruments
US COMMERCE21 citations91
US5373232ADec 13, 1994
Method of and articles for accurately determining relative positions of lithographic artifacts
US COMMERCE2 citations58