Inventor
PENZES WILLIAM B
US4 patents
Patents
4 patentsUS5857258AJan 12, 1999
Electrical test structure and method for measuring the relative locations of conductive features on an insulating substrate
US COMMERCE133 citations96
US5602492AFeb 11, 1997
Electrical test structure and method for measuring the relative locations of conducting features on an insulating substrate
US COMMERCE108 citations96
US5920067AJul 6, 1999
Monocrystalline test and reference structures, and use for calibrating instruments
US COMMERCE43 citations91
US5373232ADec 13, 1994
Method of and articles for accurately determining relative positions of lithographic artifacts
US COMMERCE2 citations58