Inventor
ANTOLIK JERREL K
US10 patents
⚠️ This page may combine multiple inventors who share the name “ANTOLIK JERREL K”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
LAM RES CORP
9 patentsUS6936135B2Aug 30, 2005
Twist-N-Lock wafer area pressure ring and assembly for reducing particulate contaminant in a plasma processing chamber
LAM RES CORP36 citations91
US8043430B2Oct 25, 2011
Methods and apparatuses for controlling gas flow conductance in a capacitively-coupled plasma processing chamber
LAM RES CORP12 citations82
US7211170B2May 1, 2007
Twist-N-Lock wafer area pressure ring and assembly
LAM RES CORP14 citations82
US6926803B2Aug 9, 2005
Confinement ring support assembly
LAM RES CORP13 citations82
US10665435B2May 26, 2020
Chamber with vertical support stem for symmetric conductance and RF delivery
LAM RES CORP1 citations72
US10395902B2Aug 27, 2019
Chamber with vertical support stem for symmetric conductance and RF delivery
LAM RES CORP1 citations72
US10049862B2Aug 14, 2018
Chamber with vertical support stem for symmetric conductance and RF delivery
LAM RES CORP4 citations72
US11495486B2Nov 8, 2022
Integrated tool lift
LAM RES CORP2 citations67
US12027411B2Jul 2, 2024
Integrated tool lift
LAM RES CORP0 citations56