Inventor

MASON ARON ABRAMOWSKI

US2 patents

Patents

2 patents

US7698952B2Apr 20, 2010

Pressure sensing device

KLA TENCOR CORP13 citations81

US7497134B2Mar 3, 2009

Process condition measuring device and method for measuring shear force on a surface of a substrate that undergoes a polishing or planarization process

KLA TENCOR CORP10 citations81