Inventor

WOO SANGGYUN

KR4 patents

⚠️ This page may combine multiple inventors who share the name “WOO SANGGYUN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

SAMSUNG ELECTRONICS CO LTD

3 patents

US6730458B1May 4, 2004

Method for forming fine patterns through effective glass transition temperature reduction

SAMSUNG ELECTRONICS CO LTD26 citations90

US6849378B2Feb 1, 2005

Photosensitive polymers, resist compositions comprising the same, and methods for forming photoresistive patterns

SAMSUNG ELECTRONICS CO LTD17 citations75

US8048595B2Nov 1, 2011

Extreme ultraviolet photomask and methods and apparatuses for manufacturing the extreme ultraviolet photomask

SAMSUNG ELECTRONICS CO LTD2 citations54

JANG ILYONG

1 patent

US8216748B2Jul 10, 2012

Extreme ultraviolet photomask

JANG ILYONG1 citations38