Inventor

CHE LUFENG

CN4 patents

⚠️ This page may combine multiple inventors who share the name “CHE LUFENG”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

SHANGHAI INST MICROSYSTEM & INFORMATION TECH CAS

2 patents

US9476906B2Oct 25, 2016

Capacitive acceleration sensor with an H-shaped beam and preparation method thereof

SHANGHAI INST MICROSYSTEM & INFORMATION TECH CAS0 citations38

US9625487B2Apr 18, 2017

Capacitive acceleration sensor with a bending elastic beam and preparation method thereof

SHANGHAI INST MICROSYSTEM & INFORMATION TECH CAS0 citations37

UNIV ZHEJIANG

1 patent

US11780727B2Oct 10, 2023

Low-stress packaging structure for MEMS acceleration sensor chip

UNIV ZHEJIANG0 citations52

SHANGHAI INST OF MICROSYSTEM AND INFORMATION TECH CHINESE ACAD

1 patent

US9625488B2Apr 18, 2017

Variable area capacitive lateral acceleration sensor and preparation method thereof

SHANGHAI INST OF MICROSYSTEM AND INFORMATION TECH CHINESE ACAD0 citations26