Inventor
LAM GARY
US5 patents
⚠️ This page may combine multiple inventors who share the name “LAM GARY”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
4 patentsUS6790768B2Sep 14, 2004
Methods and apparatus for polishing substrates comprising conductive and dielectric materials with reduced topographical defects
APPLIED MATERIALS INC13 citations92
US6960521B2Nov 1, 2005
Method and apparatus for polishing metal and dielectric substrates
APPLIED MATERIALS INC6 citations73
US6780773B2Aug 24, 2004
Method of chemical mechanical polishing with high throughput and low dishing
APPLIED MATERIALS INC10 citations73
US7232761B2Jun 19, 2007
Method of chemical mechanical polishing with high throughput and low dishing
APPLIED MATERIALS INC1 citations62