Inventor
PEMMASANI SAKETH
IN4 patents
Patents
4 patentsUS12338530B2Jun 24, 2025
Shaped showerhead for edge plasma modulation
APPLIED MATERIALS INC0 citations58
US11929278B2Mar 12, 2024
Low impedance current path for edge non-uniformity tuning
APPLIED MATERIALS INC0 citations58
US11869795B2Jan 9, 2024
Mesa height modulation for thickness correction
APPLIED MATERIALS INC0 citations58
US12562355B2Feb 24, 2026
Isolator for processing chambers
APPLIED MATERIALS INC0 citations56