Inventor
GOPPINGER ALOIS
2 patents
Patents
2 patentsUS4062714ADec 13, 1977
Process for making hollow silicon bodies and bodies utilizing board-shaped members to form the basic geometric shape so made
WACKER CHEMITRONIC20 citations77
US4160797AJul 10, 1979
Process for the deposition of polycrystalline silicon from the gas phase on heated carriers
WACKER CHEMITRONIC9 citations71