Inventor
HAMSTER HELMUT
6 patents
Patents
6 patentsUS4179530ADec 18, 1979
Process for the deposition of pure semiconductor material
WACKER CHEMITRONIC409 citations97
US4311545AJan 19, 1982
Method for the deposition of pure semiconductor material
WACKER CHEMITRONIC57 citations93
US4173944ANov 13, 1979
Silverplated vapor deposition chamber
WACKER CHEMITRONIC51 citations91
US4062714ADec 13, 1977
Process for making hollow silicon bodies and bodies utilizing board-shaped members to form the basic geometric shape so made
WACKER CHEMITRONIC20 citations77
US4065533ADec 27, 1977
Process for the continuous production of silicon rods or tubes by gaseous deposition into a flexible wound band
WACKER CHEMITRONIC8 citations72
US4160797AJul 10, 1979
Process for the deposition of polycrystalline silicon from the gas phase on heated carriers
WACKER CHEMITRONIC9 citations71