Inventor
STACKLIES SIEGFRIED
DE6 patents
⚠️ This page may combine multiple inventors who share the name “STACKLIES SIEGFRIED”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ZEISS CARL SMT AG
5 patentsUS7118449B1Oct 10, 2006
Method of manufacturing an optical element
ZEISS CARL SMT AG33 citations91
US7164964B2Jan 16, 2007
Method for producing an aspherical optical element
ZEISS CARL SMT AG23 citations90
US7481543B1Jan 27, 2009
Mirror for use in a projection exposure apparatus
ZEISS CARL SMT AG8 citations82
US7077533B2Jul 18, 2006
Reflecting device for electromagnetic waves
ZEISS CARL SMT AG6 citations61
US6951500B2Oct 4, 2005
Workpiece-surface processing head
ZEISS CARL SMT AG0 citations49