Inventor
SAKAKI KAZUTOSHI
JP4 patents
Patents
4 patentsUS6925355B2Aug 2, 2005
Substrate transfer device
SUMITOMO HEAVY INDUSTRIES8 citations71
US7239939B2Jul 3, 2007
Substrate transfer device
SUMITOMO HEAVY INDUSTRIES3 citations60
US6779432B2Aug 24, 2004
Servo circuit for use with air pressure actuator capable of improving speed control performance
SUMITOMO HEAVY INDUSTRIES2 citations57
US6789457B2Sep 14, 2004
Gas pressure actuator capable of stably driving and controlling its slider, and method for controlling the gas pressure actuator
SUMITOMO HEAVY INDUSTRIES1 citations46