Inventor
SAKURAI NORIKO
JP13 patents
⚠️ This page may combine multiple inventors who share the name “SAKURAI NORIKO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
KIOXIA CORP
7 patentsUS12573596B2Mar 10, 2026
Plasma treatment apparatus, plasma treatment method, and original plate manufacturing method
KIOXIA CORP0 citations61
US12575385B2Mar 10, 2026
Etching method, etching apparatus, manufacturing method of semiconductor device, and manufacturing method of template
KIOXIA CORP0 citations61
US11789365B2Oct 17, 2023
Substrate processing method and substrate processing apparatus
KIOXIA CORP0 citations61
US11493846B2Nov 8, 2022
Pattern forming method and template manufacturing method
KIOXIA CORP0 citations61
US12326660B2Jun 10, 2025
Pattern forming method, combined processing apparatus, and recording medium
KIOXIA CORP0 citations60
US11931923B2Mar 19, 2024
Method of manufacturing template and method of forming pattern
KIOXIA CORP0 citations50
US11796910B2Oct 24, 2023
Template, manufacturing method of template
KIOXIA CORP0 citations50