Inventor
TOZAWA MASAKI
JP5 patents
Patents
5 patentsUS7113838B2Sep 26, 2006
Method and apparatus for monitoring tool performance
TOKYO ELECTRON LTD111 citations96
US6215087B1Apr 10, 2001
Plasma film forming method and plasma film forming apparatus
TOKYO ELECTRON LTD57 citations95
US6355902B2Mar 12, 2002
Plasma film forming method and plasma film forming apparatus
TOKYO ELECTRON LTD23 citations92
US6443165B1Sep 3, 2002
Method for cleaning plasma treatment device and plasma treatment system
TOKYO ELECTRON LTD24 citations91
US7636608B2Dec 22, 2009
Method for dynamic sensor configuration and runtime execution
TOKYO ELECTRON LTD17 citations83