Inventor
VAN GROOS PIETER JOHANNES MARIUS
NL3 patents
Patents
3 patentsUS7576831B2Aug 18, 2009
Method and apparatus for maintaining a machine part
ASML NETHERLANDS BV2 citations58
US8003308B2Aug 23, 2011
Lithographic apparatus and device manufacturing method for writing a digital image
ASML NETHERLANDS BV2 citations54
US7742148B2Jun 22, 2010
Lithographic apparatus and device manufacturing method for writing a digital image
ASML NETHERLANDS BV1 citations44