Inventor
LIU EN-SHAO
US6 patents
Patents
6 patentsUS10204999B2Feb 12, 2019
Transistor with airgap spacer
INTEL CORP8 citations82
US10535747B2Jan 14, 2020
Transistor with dual-gate spacer
INTEL CORP5 citations72
US10431661B2Oct 1, 2019
Transistor with inner-gate spacer
INTEL CORP5 citations71
US11824002B2Nov 21, 2023
Variable pitch and stack height for high performance interconnects
INTEL CORP0 citations62
US10923574B2Feb 16, 2021
Transistor with inner-gate spacer
INTEL CORP1 citations61
US11114538B2Sep 7, 2021
Transistor with an airgap spacer adjacent to a transistor gate
INTEL CORP0 citations60