Inventor
SEDGWICK THOMAS O
US8 patents
Patents
8 patentsUS4601779AJul 22, 1986
Method of producing a thin silicon-on-insulator layer
IBM123 citations95
US5227330AJul 13, 1993
Comprehensive process for low temperature SI epit axial growth
IBM24 citations90
US3971860AJul 27, 1976
Method for making device for high resolution electron beam fabrication
IBM34 citations90
US5378651AJan 3, 1995
Comprehensive process for low temperature epitaxial growth
IBM39 citations88
US4354198AOct 12, 1982
Zinc-sulphide capping layer for gallium-arsenide device
IBM23 citations81
US5635242AJun 3, 1997
Method and apparatus for preventing rupture and contamination of an ultra-clean APCVD reactor during shutdown
IBM8 citations73
US5487783AJan 30, 1996
Method and apparatus for preventing rupture and contamination of an ultra-clean APCVD reactor during shutdown
IBM8 citations73
US4211803AJul 8, 1980
CVD Growth of magnetic oxide films having growth induced anisotropy
IBM15 citations72