Inventor
STEINBERG GEORGE N
7 patents
⚠️ This page may combine multiple inventors who share the name “STEINBERG GEORGE N”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
PERKIN ELMER CORP
5 patentsUS4431898AFeb 14, 1984
Inductively coupled discharge for plasma etching and resist stripping
PERKIN ELMER CORP162 citations98
US4368092AJan 11, 1983
Apparatus for the etching for semiconductor devices
PERKIN ELMER CORP103 citations95
US4367114AJan 4, 1983
High speed plasma etching system
PERKIN ELMER CORP66 citations92
US4032862AJun 28, 1977
High power electrodeless gas arc lamp for pumping lasers
PERKIN ELMER CORP9 citations69
US4473777ASep 25, 1984
Electron emitter assembly
PERKIN ELMER CORP4 citations60