Inventor
KURIO SEIKO
JP2 patents
Patents
2 patentsUS5407780AApr 18, 1995
Radiation-sensitive positive resist composition comprising an alkali-soluble resin made from m-cresol, 2-tert-butl-5-methyl phenol and formaldehyde
SUMITOMO CHEMICAL CO8 citations72
US5403696AApr 4, 1995
Radiation-sensitive positive resist composition comprising an alkali-soluble resin made from tert-butyl-methyl phenol
SUMITOMO CHEMICAL CO7 citations71