Inventor
HSU TZU JENG
TW7 patents
⚠️ This page may combine multiple inventors who share the name “HSU TZU JENG”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TAIWAN SEMICONDUCTOR MFG CO LTD
3 patentsUS11153957B2Oct 19, 2021
Apparatus and method for generating an electromagnetic radiation
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US12487531B2Dec 2, 2025
Extreme ultraviolet (EUV) radiation source apparatus, EUV lithography system, and method for generating extreme ultraviolet radiation
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations61
US10991604B2Apr 27, 2021
Method of manufacturing semiconductor structure
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations50
TAIWAN SEMICONDUCTOR MFG
2 patentsUS6194104B1Feb 27, 2001
Optical proximity correction (OPC) method for improving lithography process window
TAIWAN SEMICONDUCTOR MFG326 citations96
US6477432B1Nov 5, 2002
Statistical in-process quality control sampling based on product stability through a systematic operation system and method
TAIWAN SEMICONDUCTOR MFG88 citations91