Inventor
GELMI ILARIA
IT9 patents
⚠️ This page may combine multiple inventors who share the name “GELMI ILARIA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ST MICROELECTRONICS SRL
8 patentsUS6696364B2Feb 24, 2004
Method for manipulating MEMS devices, integrated on a wafer semiconductor and intended to be diced one from the other, and relevant support
ST MICROELECTRONICS SRL13 citations79
US6197655B1Mar 6, 2001
Method for manufacturing integrated structures including removing a sacrificial region
ST MICROELECTRONICS SRL11 citations71
US8344466B2Jan 1, 2013
Process for manufacturing MEMS devices having buried cavities and MEMS device obtained thereby
ST MICROELECTRONICS SRL5 citations70
US12134556B2Nov 5, 2024
Semiconductor device and method for manufacturing a semiconductor device
ST MICROELECTRONICS SRL0 citations62
US6395618B2May 28, 2002
Method for manufacturing integrated structures including removing a sacrificial region
ST MICROELECTRONICS SRL5 citations60
US11945712B2Apr 2, 2024
Process for manufacturing a micro-electro-mechanical device, and MEMS device
ST MICROELECTRONICS SRL0 citations51
US10322931B2Jun 18, 2019
Dry scribing methods, devices and systems
ST MICROELECTRONICS SRL0 citations50
US9731965B1Aug 15, 2017
Dry scribing methods, devices and systems
ST MICROELECTRONICS SRL0 citations50