Inventor

ENDOH SHOSUKE

JP8 patents

⚠️ This page may combine multiple inventors who share the name “ENDOH SHOSUKE”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

TOKYO ELECTRON LTD

5 patents

US7622017B2Nov 24, 2009

Processing apparatus and gas discharge suppressing member

TOKYO ELECTRON LTD8 citations83

US7927066B2Apr 19, 2011

Reflecting device, communicating pipe, exhausting pump, exhaust system, method for cleaning the system, storage medium storing program for implementing the method, substrate processing apparatus, and particle capturing component

TOKYO ELECTRON LTD8 citations82

US7850174B2Dec 14, 2010

Plasma processing apparatus and focus ring

TOKYO ELECTRON LTD7 citations73

US5961361AOct 5, 1999

Method for manufacturing electrode plate for plasma processing device

TOKYO ELECTRON LTD10 citations65

US7604845B2Oct 20, 2009

Method for coating internal member having holes in vacuum processing apparatus and the internal member having holes coated by using the coating method

TOKYO ELECTRON LTD3 citations53

ENDOH SHOSUKE

2 patents

US8114247B2Feb 14, 2012

Plasma processing apparatus and focus ring

ENDOH SHOSUKE8 citations81

US8124539B2Feb 28, 2012

Plasma processing apparatus, focus ring, and susceptor

ENDOH SHOSUKE12 citations80

MORIYA TSUYOSHI

1 patent

US8727708B2May 20, 2014

Reflecting device, communicating pipe, exhausting pump, exhaust system, method for cleaning the system, storage medium storing program for implementing the method, substrate processing apparatus, and particle capturing component

MORIYA TSUYOSHI1 citations60