Inventor
BOHER PIERRE
FR5 patents
⚠️ This page may combine multiple inventors who share the name “BOHER PIERRE”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
PRODUCTION ET DE RECH S APPLIQ
3 patentsUS6819423B2Nov 16, 2004
High spatial resolution infrared ellipsometer
PRODUCTION ET DE RECH S APPLIQ35 citations83
US6687002B2Feb 3, 2004
Method and apparatus for ellipsometric metrology for a sample contained in a chamber or the like
PRODUCTION ET DE RECH S APPLIQ13 citations81
US7230701B2Jun 12, 2007
Compact spectroscopic ellipsometer
PRODUCTION ET DE RECH S APPLIQ2 citations54