Inventor
SHIRATANI Motohiro
JP12 patents
Patents
12 patentsUS11270883B2Mar 8, 2022
Pattern-forming method and composition
JSR CORP2 citations71
US12529144B2Jan 20, 2026
Composition, method of producing substrate, and polymer
JSR CORP0 citations61
US12332563B2Jun 17, 2025
Pattern-forming method and composition
JSR CORP0 citations61
US11796912B2Oct 24, 2023
Radiation-sensitive composition and pattern-forming method
JSR CORP0 citations59
US12372869B2Jul 29, 2025
Method for forming resist pattern and radiation-sensitive resin composition
JSR CORP0 citations58
US12065534B2Aug 20, 2024
Composition, method of producing substrate, and polymer
JSR CORP0 citations51
US11204552B2Dec 21, 2021
Radiation-sensitive composition, pattern-forming method and radiation-sensitive acid generating agent
JSR CORP0 citations51
US11603480B2Mar 14, 2023
Composition for underlayer film formation, underlayer film for directed self-assembled film and forming method thereof, and directed self-assembly lithography process
JSR CORP0 citations49
US11319388B2May 3, 2022
Radiation-sensitive resin composition, production method thereof, and resist pattern-forming method
JSR CORP0 citations47
US11745216B2Sep 5, 2023
Method for producing film
JSR CORP0 citations45
US10725376B2Jul 28, 2020
Pattern-forming method
JSR CORP0 citations40
US10520815B2Dec 31, 2019
Pattern-forming method
JSR CORP0 citations38