Inventor
BENJAMINSON DAVID
US14 patents
Patents
14 patentsUS9741593B2Aug 22, 2017
Thermal management systems and methods for wafer processing systems
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US9691645B2Jun 27, 2017
Bolted wafer chuck thermal management systems and methods for wafer processing systems
APPLIED MATERIALS INC118 citations96
US10147620B2Dec 4, 2018
Bolted wafer chuck thermal management systems and methods for wafer processing systems
APPLIED MATERIALS INC68 citations95
US10468276B2Nov 5, 2019
Thermal management systems and methods for wafer processing systems
APPLIED MATERIALS INC9 citations84
US11049755B2Jun 29, 2021
Semiconductor substrate supports with embedded RF shield
APPLIED MATERIALS INC8 citations80
US11158527B2Oct 26, 2021
Thermal management systems and methods for wafer processing systems
APPLIED MATERIALS INC2 citations73
US9896770B2Feb 20, 2018
Methods of etching films with reduced surface roughness
APPLIED MATERIALS INC2 citations73
US9540736B2Jan 10, 2017
Methods of etching films with reduced surface roughness
APPLIED MATERIALS INC2 citations73
US10607867B2Mar 31, 2020
Bolted wafer chuck thermal management systems and methods for wafer processing systems
APPLIED MATERIALS INC2 citations71
US11062887B2Jul 13, 2021
High temperature RF heater pedestals
APPLIED MATERIALS INC1 citations62
US11217462B2Jan 4, 2022
Bolted wafer chuck thermal management systems and methods for wafer processing systems
APPLIED MATERIALS INC0 citations60
US10233547B2Mar 19, 2019
Methods of etching films with reduced surface roughness
APPLIED MATERIALS INC0 citations52
US11776822B2Oct 3, 2023
Wet cleaning of electrostatic chuck
APPLIED MATERIALS INC0 citations50
US12488967B2Dec 2, 2025
Extreme uniformity heated substrate support assembly
APPLIED MATERIALS INC0 citations48