Inventor
MATH ANANDA SEELAVANTH
IN4 patents
Patents
4 patentsUS9691645B2Jun 27, 2017
Bolted wafer chuck thermal management systems and methods for wafer processing systems
APPLIED MATERIALS INC118 citations96
US10147620B2Dec 4, 2018
Bolted wafer chuck thermal management systems and methods for wafer processing systems
APPLIED MATERIALS INC68 citations95
US10607867B2Mar 31, 2020
Bolted wafer chuck thermal management systems and methods for wafer processing systems
APPLIED MATERIALS INC2 citations71
US11217462B2Jan 4, 2022
Bolted wafer chuck thermal management systems and methods for wafer processing systems
APPLIED MATERIALS INC0 citations60