Inventor
LUDWIG JEFFREY
US7 patents
⚠️ This page may combine multiple inventors who share the name “LUDWIG JEFFREY”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
6 patentsUSD931240SSep 21, 2021
Substrate support pedestal
APPLIED MATERIALS INC18 citations93
US11668602B2Jun 6, 2023
Spatial optical emission spectroscopy for etch uniformity
APPLIED MATERIALS INC2 citations71
US12405164B2Sep 2, 2025
Spatial optical emission spectroscopy for etch uniformity
APPLIED MATERIALS INC0 citations60
US11264252B2Mar 1, 2022
Chamber lid with integrated heater
APPLIED MATERIALS INC0 citations60
US12068135B2Aug 20, 2024
Fast gas exchange apparatus, system, and method
APPLIED MATERIALS INC0 citations42
US9355776B2May 31, 2016
Capacitor assemblies for coupling radio frequency (RF) and direct current (DC) energy to one or more common electrodes
APPLIED MATERIALS INC0 citations41