Inventor
COTLEAR ROBERTO CESAR
US5 patents
Patents
5 patentsUS10283397B2May 7, 2019
Substrate lift pin actuator
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US10490435B2Nov 26, 2019
Cooling element for an electrostatic chuck assembly
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US11387135B2Jul 12, 2022
Conductive wafer lift pin o-ring gripper with resistor
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US11264252B2Mar 1, 2022
Chamber lid with integrated heater
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US9155184B2Oct 6, 2015
Plasma generation source employing dielectric conduit assemblies having removable interfaces and related assemblies and methods
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