Inventor
Luan pingshan
US6 patents
Patents
6 patentsUS11424120B2Aug 23, 2022
Plasma etching techniques
TOKYO ELECTRON LTD7 citations82
US11538690B2Dec 27, 2022
Plasma etching techniques
TOKYO ELECTRON LTD5 citations71
US11482423B2Oct 25, 2022
Plasma etching techniques
TOKYO ELECTRON LTD1 citations60
US12002683B2Jun 4, 2024
Lateral etching of silicon
TOKYO ELECTRON LTD1 citations59
US11837467B2Dec 5, 2023
Plasma etching techniques
TOKYO ELECTRON LTD1 citations59
US12272558B2Apr 8, 2025
Selective and isotropic etch of silicon over silicon-germanium alloys and dielectrics; via new chemistry and surface modification
TOKYO ELECTRON LTD0 citations47