Inventor
SON SUNG DUK
KR5 patents
Patents
5 patentsUS11786946B2Oct 17, 2023
Cleaning method and film forming apparatus
TOKYO ELECTRON LTD4 citations72
US12018366B2Jun 25, 2024
Substrate processing apparatus and cleaning method
TOKYO ELECTRON LTD0 citations58
US12334380B2Jun 17, 2025
Boat transfer method and heat treatment apparatus
TOKYO ELECTRON LTD0 citations55
US11725281B2Aug 15, 2023
Gas introduction structure, thermal processing apparatus and gas supply method
TOKYO ELECTRON LTD0 citations50
US8871655B2Oct 28, 2014
Method of forming silicon oxycarbonitride film
TOKYO ELECTRON LTD0 citations50