Inventor
SALVETAT THIERRY
FR4 patents
Patents
4 patentsUS11587826B2Feb 21, 2023
Method for suspending a thin layer on a cavity with a stiffening effect obtained by pressurizing the cavity by implanted species
COMMISSARIAT ENERGIE ATOMIQUE0 citations53
US12525489B2Jan 13, 2026
Method for transferring a thin layer onto a receiver substrate including cavities and a region devoid of cavities
COMMISSARIAT ENERGIE ATOMIQUE0 citations49
US12234144B2Feb 25, 2025
Method for sealing cavities using membranes
COMMISSARIAT ENERGIE ATOMIQUE0 citations48
US11401162B2Aug 2, 2022
Method for transferring a useful layer into a supporting substrate
COMMISSARIAT ENERGIE ATOMIQUE0 citations47