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Inventor
EBEL TIMOTHY M
US
2 patents
⚠️ This page may combine multiple inventors who share the name “EBEL TIMOTHY M”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
BIPOLAR INTEGRATED TECHNOLOGY
1 patent
US5145571A
Sep 8, 1992
Gold interconnect with sidewall-spacers
BIPOLAR INTEGRATED TECHNOLOGY
41 citations
89
LAM RES CORP
1 patent
US6235640B1
May 22, 2001
Techniques for forming contact holes through to a silicon layer of a substrate
LAM RES CORP
42 citations
84