Inventor
KONNO TAKEHIKO
JP6 patents
⚠️ This page may combine multiple inventors who share the name “KONNO TAKEHIKO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
HITACHI HIGH TECH CORP
4 patentsUS7294833B2Nov 13, 2007
Method of alignment for efficient defect review
HITACHI HIGH TECH CORP15 citations91
US10269536B2Apr 23, 2019
Electron microscope
HITACHI HIGH TECH CORP4 citations72
US7995833B2Aug 9, 2011
Method of alignment for efficient defect review
HITACHI HIGH TECH CORP6 citations72
US9766401B2Sep 19, 2017
Defect review apparatus and method for correcting coordinate misalignment using two light sources
HITACHI HIGH TECH CORP0 citations38