Inventor
CHENG YA-LUN
TW3 patents
Patents
3 patentsUS6991991B2Jan 31, 2006
Method for preventing to form a spacer undercut in SEG pre-clean process
UNITED MICROELECTRONICS CORP67 citations96
US7037793B2May 2, 2006
Method of forming a transistor using selective epitaxial growth
UNITED MICROELECTRONICS CORP21 citations90
US7306681B2Dec 11, 2007
Method of cleaning a semiconductor substrate
UNITED MICROELECTRONICS CORP3 citations61