Inventor
FU HSUEH-SHIH
TW3 patents
Patents
3 patentsUS7359759B2Apr 15, 2008
Method and system for virtual metrology in semiconductor manufacturing
TAIWAN SEMICONDUCTOR MFG46 citations90
US8041440B2Oct 18, 2011
Method and system for providing a selection of golden tools for better defect density and product yield
TAIWAN SEMICONDUCTOR MFG4 citations60
US7184851B2Feb 27, 2007
Method of providing cassettes containing control wafers to designated processing tools and metrology tools
TAIWAN SEMICONDUCTOR MFG2 citations56