Inventor
HASHIMA HITOSHI
JP5 patents
Patents
5 patentsUS7326299B2Feb 5, 2008
Process liquid supply nozzle, process liquid supply device and nozzle cleaning method
TOKYO ELECTRON LTD4 citations59
US12321098B2Jun 3, 2025
Substrate support member, substrate treatment apparatus, and substrate transfer apparatus
TOKYO ELECTRON LTD0 citations56
US12077392B2Sep 3, 2024
Substrate transfer apparatus and substrate transfer method
TOKYO ELECTRON LTD1 citations54
US10549302B2Feb 4, 2020
Operating method of processing liquid supply apparatus and recording medium
TOKYO ELECTRON LTD0 citations46
US9943871B2Apr 17, 2018
Processing liquid supply apparatus, operating method of processing liquid supply apparatus, and recording medium
TOKYO ELECTRON LTD1 citations46