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Inventor
Yang wu-zhang
TW
2 patents
Patents
2 patents
US8729655B2
May 20, 2014
Etching narrow, tall dielectric isolation structures from a dielectric layer
LIU CHIA-YING
0 citations
40
US8338263B1
Dec 25, 2012
Etching narrow, tall dielectric isolation structures from a dielectric layer
LIU CHIA-YING
0 citations
40